Design of High Precise Focusing System in Laser Direct Writer

摘要：

In order to improve the accuracy and efficiency of fabricating lines with laser pattern generator, a novel focusing system was designed. Focusing systeM is based on optical off-axis detection principle. The detector is a two-quadrant photocell and the dcfocus signal is constructed by division. Focusing systeM has the character of second-order system with overdamp. The new embedded PID controller improves the performance of focusing system and upgrades the closed-loop precision to 0.2 μm. Furthermore focusing system has the fabrication capabilities for alterable-width lines under various defocus amount.

作者: Y Y Liang F Tian J B Luo G G Yang

作者单位: State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou,310027, China

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 1031-1036

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）