High-Bandwidth Dynamic Full-Field Profilometry for Nano-Scale Characterization of MEMS
The article describes an innovative optical interferometric methodology to delivery dynamic surface profilometry with a measurement bandwidth up to 10MHz or higher and a vertical resolution up to 1 run. Previous work using stroboscopic microscopic interferometry for dynamic characterization of micro (opto)electromechanical systems (M(O)EMS) has been limited in measurement bandwidth mainly within a couple of MHz. For high resonant mode analysis, the stroboscopic light pulse is insufficiently short to capture the moving fringes from dynamic motion of the detected structure. In view of this need, a microscopic prototype based on white-light stroboscopic interferometry with an innovative light superposition strategy was developed to achieve dynamic full-field profilometry with a high measurement bandwidth up to 10MHz or higher. The system primarily consists of an optical microscope, on which a Mirau interferometric objective embedded with a piezoelectric vertical translator, a highpower LED light module with dual operation modes and light synchronizing electronics unit are integrated. A micro cantilever beam used in AFM was measured to verify the system capability in accurate characterisation of dynamic behaviours of the device. The full-field seventh-mode vibration at a vibratory frequency of 3.7MHz can be fully characterized and nano-scalc vertical measurement resolution as well as tens micrometers of vertical measurement range can be performed.
Liang-Chia Chen Yao-Ting Huang Pi-Bai Chang
Graduate Institute of Automation Technology, National Taipei University of Technology, 1 Sec. 3 Chun Graduate Institute of Mechanical & Electrical Engineering, National Taipei University of Technology,
国际会议
第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)
哈尔滨
英文
1058-1062
2006-08-08（万方平台首次上网日期，不代表论文的发表时间）