Fabrication of Ultramicroelectrodes Based on PECVD

摘要：

Ultramicroelectrode (UME) is one of the key devices of electrochemical instrument. The method of the UMEs fabrication based on plasma enhanced chemical vapor deposition (PECVD) technology is described. PECVd technology is applied to produce the insulating films of UMEs that are proved to have uniform geometries, controllable thickness of insulating films and good adhcrences at the interfaces. Three types of UMEs were constructed based on PECVD technology. The Au disk UMEs were fabricated by depositing silicon nitride thin films onto the surfaces of 25 μm diameter Au fibers. The Au ring UMEs were constructed by sputtering Au films onto the surfaces of optical fibers and then depositing silicon nitride thin films onto the surfaces of Au films. Multilayered materials and conventional microfabrication techniques were applied to produce the band UME arrays and PECVD technology was used to produce the insulating films.

作者: B Yang M Z Zhu Z D Jiang W X Jing H Zhang

作者单位: State Key Laboratory for Manufacturing Systems Engineering, Xian 710049, China Institute of Precisi State Key Laboratory for Manufacturing Systems Engineering, Xian 710049, China Institute of Precisi

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 1085-1089

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）