Neuron PSD Control for Piezoelectric Micro-Displacement System

摘要：

In order to eliminate the influence of the hysteresis, creep and nonlinear of the piezoelectric ceramic and other influence of the outside factors, the adaptive neural PSD control algorithm is proposed to implement the real-time control of the micropositioning workpiece table. The experiment result verifies the validity of the close-loop control. The displacement precision is 0.01 μm, and response time is less than 0.1s.

作者: C K Gong D J Chen

作者单位: College of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 20093, China

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 1107-1111

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）