Improvement of Vision Measurement Accuracy Using Zernike Moment Based Edge Location Error Compensation Model
This paper presents the Zernike moment based model developed to compensate edge location errors for further improvement of the vision measurement accuracy by compensating the slight changes resulting from sampling and establishing mathematic expressions for subpixel location of theoretical and actual edges which are either vertical to or at an angle with Xaxis. Experimental results show that the proposed model can be used to achieve a vision measurement accuracy of up to 0.08 pixel while the measurement uncertainty is less than 0.36um. It is therefore concluded that as a model which can be used to achieve a significant improvement of vision measurement accuracy, the proposed model is especially suitable for edge location of images with low contrast.
vision measurement zernike moment edge location error compensation model
J W Cui J B Tan Y Zhou H Zhang
Ultra-precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, PO Box Ultra-precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology,PO Box
国际会议
第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)
哈尔滨
英文
1353-1360
2006-08-08（万方平台首次上网日期，不代表论文的发表时间）