Vacuum measurement on vacuum packaged MEMS devices

摘要：

This paper investigates the relationship between the resonance impedance of a tuning fork quartz oscillator and the small size cavity vacuum pressure and develops an on-line vacuum measurement system to track real-time vacuum pressure in MEMS devices. Furthermore, authors completely analyze all facts that affect the resonance impedance. A set of metal vacuum packaged devices have been monitored for more than 10 months using this on-line vacuum measurement system. The results indicate that it is very critical to investigate vacuum packaging processes, reliability and durability of the vacuum devices by using this on-line vacuum measurement system.

关键词： vacuum measurement vacuum monitor vacuum packaging MEMS devices

作者: Zhiyin Gan Dong Lin Xuefang Wang Chenggang Honghai Zhang Sheng Liu

作者单位: Institute of Microsystems and Wuhan National Laboratory for Optoelectronics,Huazhong University of S Institute of Microsystems and Wuhan National Laboratory for Optoelectronics,Huazhong University of S Institute of Microsystems and Wuhan National Laboratory for Optoelectronics,Huazhong University of S

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 1429-1434

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）