The Optimized Design of Accelerometer for the UV-LIGA Process

摘要：

An optimized design of accelerometer was presented for the UV-LIGA process in this paper. Based on the FEA simulation of mechanical property and developing process, traditional comb-finger accelerometer was optimized for UV-LIGA process. The Finite Element analysis (FEA) result of mechnical property demonstrates that the novel design offer the 2.96 times in sensitivity. Moreover, novel structure makes the hydrodynamics property during the developing process much better than that of traditional structure. It is great characters for the precision developing result and quality manufacture.

作者: Y L Gao P Jin N Liu J BTan

作者单位: Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology,

会议类型: 国际会议

会议名称: 第四届仪器科学与技术国际会议( 4th International Symposium on Instrumentation and Science and Tcchnology)

会议地点: 哈尔滨

会议语种:英文

页码: 1465-1470

在线出版日期: 2006-08-08（万方平台首次上网日期，不代表论文的发表时间）