Growth of copper-indium nanorods on Si substrate using porous anodic alumina as template
Copper-indium nanorod arrays have been synthesized by electrodeposition using porous anodic alumina nano template supported on a silicon substrate. Porous anodic alumina template was fabricated by evaporating aluminium film onto silicon substrate and then anodizing the aluminium film in diluted phosphoriC acid. The approach employs a plasma etching to penetrate the alumina pore barrier layer before electrodeposition, which enables direct electrical and chemical contact with the silicon substrate electrode. The resulting template and copper-indium nonorods obtained were characterized using scanning electron microscopy (SEM) and energy-dispersived Xray spectroscopic analyzer (EDS), the pores of alumina are found to have dimensions of 150-250 nm pore diameters and 330-510 nm pore spacings, partial filling of the pores of the alumina template by Cu-In is achieved. The results of this work reveal that the alumina nano template is particularly well suited to the etching mask and template-assisted growth of nanostructures to be integrated into rigid substrate.
Z W Zhang H Lam J Li M Wang G S Jiang C Surya C F Zhu
Department of Materials Science and Engineering University of Science and Technology of China,Hefei, Department of Electronic and Information Engineering The Hong Kong Polytechnic University,Hong Kong,
国际会议
The 8th China International Nanoscience and Technology Symposium(2009第八届中国国际纳米科技湘潭研讨会Cinsts09)
湖南湘潭
英文
1-4
2009-10-23（万方平台首次上网日期，不代表论文的发表时间）