A silicon micromachined resonant pressure sensor

摘要：

This paper describes the design, fabrication and test of a silicon micromachined resonant pressure sensor. A square membrane and a doubly clamped resonant beam constitute a compound structure. The former senses the pressure directly, while the latter changes its resonant frequency according to deformation of the membrane. The final output relation between the resonant frequency and the applied pressure is deducted according to the structure mechanical properties. Sensors are fabricated by micromachining technology, and then sealed in vaccum. These sensors are tested by open-loop and close-loop system designed on purpose. The experiment results demonstrate that the sensor has a sensitivity of 49.8Hz/kPa and repeatability of 0.08%.

作者: Zhangyang Tang Shangchun Fan Chenguang Cai

作者单位: School of Instrumentation Science & Opto-electrionics Engineering,Beihang University,Beijing,100191, School of Instrumentation Science & Opto-electrionics Engineering,Beihang University,Beijing,100191,

会议类型: 国际会议

会议名称: The 8th China International Nanoscience and Technology Symposium(2009第八届中国国际纳米科技湘潭研讨会Cinsts09)

会议地点: 湖南湘潭

会议语种:英文

页码: 1-4

在线出版日期: 2009-10-23（万方平台首次上网日期，不代表论文的发表时间）