会议专题

Effect of working temperature on pumping property of Ti-7.5 wt.%Mo getter

The metal getter Ti-7.5 wt.% Mo was prepared by traditional powder metallurgy technology. As a typical type of room temper ature getter,the pumping property at room temperature has been studied.However,it was found that the Ti-7.5 wt.% Mo getter exhibited an anomaly at different working temperature due to some special processing conditions for some vacuum devices. The purpose of this work is to better understand the special phenomenon.Hydrogen pumping properties at different working temperature and in different working manner have therefore been studied at the activation temperature of 750 ?.X-ray diffraction was used to investigate the structural modifi cations of the specimen. The results obtained,showing that hydrogen reacts with the titanium in the Ti-7.5 wt.% Mo material,the reac tion layer seems to be a barrier to prevent further pumping.However,after being activated at 750℃,the getter appears to be less influ enced.

getter working temperature X-ray diffraction pumping property

ZHANG Yan LI Tengfei WEI Xiuying YUAN Peng MAO Changhui

Institute of Advanced Electronic Materials,General Research Institute for Non-Ferrous Metals,Beijing 100088,China

国际会议

The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

浙江嘉兴

英文

407-410

2009-10-20(万方平台首次上网日期,不代表论文的发表时间)