Influence of deposited temperature on the multi-component (Cr,Ti,Al)N films by ion beam assisted reactive mid-frequency magnetron sputtering
To improve the service performance of tools and moulds,(Cr,Ti,Al)N multi-composite hard films were deposited by ion beam assisted reactive mid-frequency magnetron sputtering. The energy dispersive spectroscopy (EDS),X-ray diffraction (XRD),trans mission electron microscope(TEM) and micro-hardness tester,scratching tester and scanning electronic microscopy (SEM) had been used to investigate the films composition,microstructure,hardness and adhesive strength. The structure and properties of films and the influence of deposited temperature on the films also had been researched.It is found that (Cr,Ti,Al) N films had been prepared success fully by ion beam assisted reactive mid-frequency magnetron sputtering. The crystal structures were based on fcc structure of CrN and Cr atoms were instead of partial Ti and Al atoms. The films have good comprehensive performance with micro-hardness of 31 GPa,adhesion strength of 80N and resistance to high temperature of 700 ? oxidation above 3 h.With the increase of the deposited temperature,the films composition did not vary within wide limits,the columnar growth became dominated,along(200)grain orientation were intensified,leading to the increase of hardness and the decrease of friction coefficient.However,the adhesion strength of the films decreased.
thin films (Cr,Ti,Al)N mid-frequency magnetron sputtering ion beam assisted multi-component
LIN Songsheng DAI Mingjiang ZHU Xiagao HOU Huijun DAI Dahuang
Guangzhou Research Institute of Non-Ferrous Metals,Guangzhou 510651,China
国际会议
The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)
浙江嘉兴
英文
437-441
2009-10-20（万方平台首次上网日期，不代表论文的发表时间）