Influence of thermo-mechanical treatment on properties of tungsten target

摘要：

The tungsten target,used for semiconductor devices in this paper,was firstly solidified by powder metallurgy (PM) method and then processed with thermo-mechanical treatment.It was investigated that the influence of thermo-mechanical treatment on the proper ties of tungsten target,which include mass density,grain size,grain orientation. Through optimizing the thermo-mechanical treatment technology,the tungsten target with high mass density,fine grains,and weak textures was finally manufactured.

关键词： tungsten target thermo-mechanical treatment mass density grain size grain orientation

作者: DING Zhaochong ZHU Xiaoguang CHEN Ming HE Jinjiang

作者单位: Grikin Advanced Materials Co.,Ltd,Beijing 102200,China

会议类型: 国际会议

会议名称: The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

会议地点: 浙江嘉兴

会议语种:英文

页码: 464-467

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）