Research on Cu/ porous silicon gas sensor

摘要：

Porous silicon (PS) surface obtained by electrochemical anodization of N-silicon was modified using cupric nitrate by electro less chemical method for passivating the surface states. Aluminium (Al) electrode was evaporated on the backside of silicon (Si).PS surface was characterized by SEM.Cu/PS sensor developed here show a sensitive response to analyse gases (ammonia and ethanol) at a room temperature.

关键词： porous-silicon Cu/PS- sensor resistance sensitivity

作者: YANG Yadi MA Wenhui CHEN Xiuhua WU Xinghui

作者单位: National Engineering Laboratory for Vacuum Metallurgy,Kunming University of Science and Technology,K Faculty of Physical Science and Technology,Yunnan University,Kunming 650091,China

会议类型: 国际会议

会议名称: The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

会议地点: 浙江嘉兴

会议语种:英文

页码: 511-513

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）