To obtain materials with the help of RF-plasma treatment at low pressure

摘要：

The paper discusses the feasibility and characteristics of radio frequency (RF) plasma at low pressures used at the present time in order to produce new materials such as nanocomposites,sorbents,rare-earth metals,fiber-reinforced composites and et al. Materials production and modification with the help of low-temperature Radio-Frequency plasma (RF-plasma) is quickly developing effective method of modern tech nology.RF-plasma at low pressure is non-equilibrium. This allows one to control the ion flow effect on materi als and regulate plasma thermal influence delicately.

作者: I.Sh.Abdullin V.V.Kudinov

作者单位: Kazan State Technological University,68,Karl Marx Street,Kazan,420015 Russia A.A.Baikov Institute of Metallurgy and Materials Science of Russia Academy of Sciences,Leninskii Pro

会议类型: 国际会议

会议名称: The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

会议地点: 浙江嘉兴

会议语种:英文

页码: 711-712

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）