A one-dimensional method of charged particle transport simulation in the cathode layer of glow discharge

摘要：

The service time of glow discharge devices such as plasma displays and film deposition installations sub stantially depends on intensity of their cathode sputte ring by ions accelerated with the electric field in the discharge cathode layer.Under current densities typical for such devices,electron and ion space charge sub stantially influences the electric field distribution in the discharge. Therefore,a self-consistent calculation of the electric field and charged particle concentration dis tributions is necessary in the process of charged particle transport simulation in the cathode layer.

作者: G.G.Bondarenko V.I.Kristya M.I.Supelnyak

作者单位: Research Institute of Advanced Materials and Technologies MSIEM (TU),M.Pionerskaya st.12,Moscow,1150 Kaluga Branch of Bauman Moscow State Technical University,Bazhenov-st.2,Kaluga,248000,Russia

会议类型: 国际会议

会议名称: The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

会议地点: 浙江嘉兴

会议语种:英文

页码: 749-750

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）