Universal thin layers of photo resists for《Dry》photolithographic

摘要：

1.Introduction It is well known that polyconjugated substituted poly-acetylenes,exhibit high thermal stability,resistance to thermal oxidation,photoelectric sensitivity,paramag-netism,and other remarkable properties. The combina tion of these properties made it possible to produce a se ries of novel unique materials based of polyconjugated polymers. A peculiar structure of macromolecules of polyconjugated polymers made it possible to apply origi nal methods of production of a variety of materials.

作者: V.M.Misin A.I.Kuzaev M.V.Misin

作者单位: Institute of Biochemical Physics,Russian Academy of Sciences,ul.Kosygina 4,Moscow,119334,Russia

会议类型: 国际会议

会议名称: The 10th China-Russia System on Advanced Materials and Technologies(第十届中俄新材料新工艺研讨会)

会议地点: 浙江嘉兴

会议语种:英文

页码: 895-897

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）