A New Robust Capacitance Mis-Match Measurement for Analog/Mized-Signal Applications
This paper presents a new capacitance mis match measurement method which is more accurate and robust compared to the conventional FGCM method. The resolution of the FGCM method is limited by the parasitics and equipments.In the proposed method,instead of the source node,the voltage on the capacitance is considered as a reference in measurement in order to minimize the effects of pre-existing charge in the floating gate and confirm that the MOSFET is operating in the saturation region.Results of 2-D process and device simulation and the measured data in a 0.13μm process are compared to verify the proposed method. It shows that,compared to the ideal value,the average of the new method are within 0.15% compared to 23.9% in conventional method while the standard deviation is within 0.2%. Also,this method can be easily implemented because the measurement method of Sr and Sm are identical to the conventional method. As a result,using the proposed method, the MIM capacitance can be measured at a much higher resolution than using the conventional method,i.e. to a subfemto level.
Mis-Match Measurement Analog/Mized Signal Application Floating Gate Capacitance Measurements
Won-Young Jung Jong-Min Kim Jin-Su Kim Jung-Hyun Choi Sang-Hoon Kwak Taek-Soo Kim Jae-Kyung Wee
TE Center,Dongbu Hitek,Inc.,222-Ⅰ,Dodang-Dong,Wonmi-Gu,Buchen,Gyeonggi-Do,420-712 Korea School of Electronics Engineering,Soongsil University,511 SangdoDong,Dongjak-Gu,Seoul 156-743 Korea
国际会议
2009 IEEE 8th International Conference on ASIC(第八届IEEE国际专用集成电路大会)
长沙
英文
270-273
2009-10-20（万方平台首次上网日期，不代表论文的发表时间）