Dynamic Property Test of a Novel High g Micro accelerometer
Aiming at the testing requirement in special situations,a kind of high overloading piezoresistive acceleration sensor with a beam-island structure,four sides of which are fixed,is designed. This acceleration sensor uses ceramic package and is encapsulated by nitrogen. Adjusting the dynamic speciality by Hopkinson impact equipment,the testing result indicates that the sensitivity and the linearity of the high g accelerometer are good,and the shock-resistibility is also in good state. The structure is still good and can output signals after impacted by 200 000g,meanwhile it can effectively satisfy special testing requirements such as acutely impact and vibration.
high g accelerometer dynamic testing shock-resistibility anti overloading
Shi Yunbo Zhu Zhengqiang Liu Xiaopeng Liu Jun Tan Qiulin
National Key Laboratory for Electronic Measurement and Technology,North University of China,Taiyuan,Shanxi,030051,China
国际会议
2009 IEEE 8th International Conference on ASIC(第八届IEEE国际专用集成电路大会)
长沙
英文
633-635
2009-10-20（万方平台首次上网日期，不代表论文的发表时间）