A Novel Preamplifier for MEMS Microphone

摘要：

MEMS microphone is used in various mobile devices,notebook applications,and hearing aids. This paper analyzes the electric model of the MEMS microphone elaborately and presents a preamplifier for MEMS Microphone. The preamplifier is realized in 0.18μm CMOS HV technology which provides high bias voltage,impedance match and weak signal preamplifying with an area of 1050μm*900μm. The post-layout simulation results show that it can operate under 1.5V~3.6V with 56ΜV RMS equivalent input noise.

关键词： Preamplifier MEMS microphone impedance match electric model.

作者: Siliang HUA Yan LIU Jianen ZHANG Donghui WANG Chaohuan HOU

作者单位: Digital System Integration Laboratory,Institute of Acoustics,Chinese Academy of Sciences,100190 P.R.China

会议类型: 国际会议

会议名称: 2009 IEEE 8th International Conference on ASIC(第八届IEEE国际专用集成电路大会)

会议地点: 长沙

会议语种:英文

页码: 636-638

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）