Flow field plate of micro fuel cell fabrication in UV-nanoimprint lithography

摘要：

A new way is brought forward for the fabrication of the flow field plate of micro fuel cell in Vnanoimprint lithography. The flow field plate of micro fuel cell is fabricated which structure is gridding. The self-breath micro fuel cell is designed,with which the flow field plate is proved in effect. The cost and processing difficulty of micro fuel cell are reduced.

关键词： Micro fuel cell Flow field plate Nanoimprint lithography UV-nanoimprint lithography

作者: Si Weihua Dong Xiaowen Gu Wenqi Liu ewen

作者单位: Institute of Microelectronics,Tsinghua University,Beijing 100084,China Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190.China Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China Institute of Microelectronics,Tsinghua University,Beijiug 100084,China

会议类型: 国际会议

会议名称: 2009 IEEE 8th International Conference on ASIC(第八届IEEE国际专用集成电路大会)

会议地点: 长沙

会议语种:英文

页码: 1019-1022

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）