Thermal Stress Analysis of The Microtoroid Under CO2 Laser

摘要：

The planar microtoroid with unique whispering gallery mode (WGM) has ultra-high Q value (UHQ) and better optical property.In order to get the UHQ cavity,it is very important to deal with the surface of microtoroid using CO2 laser reflow during the fabrication process.Because of the TEM00 laser output,there will be thermal stress which affects the Q value badly.In this paper,we design physical model and analyze the temperature distribution theoretically. Furthermore,thermal stress of different microtoroids has been tested with Raman Spectral Analyzer. At last we found that when the optical path is stabile and the lens is fixed the output power in the 7/1000 duty cycle of 30 minutes long pulse will have a good result.

关键词： CO2 laser thermal stress microtoroid Raman frequency shift

作者: Guoqing Jiang Shubin Yan Yingzhan Yan Jijun Xiong

作者单位: National Key Laboratory For Electronic Measurement Technology,North University of China,Taiyuan 0300 Key Laboratory of Instrumentation Science Dynamic Measurement,North University of China,Taiyuan 0300

会议类型: 国际会议

会议名称: 2009 IEEE 8th International Conference on ASIC(第八届IEEE国际专用集成电路大会)

会议地点: 长沙

会议语种:英文

页码: 1023-1026

在线出版日期: 2009-10-20（万方平台首次上网日期，不代表论文的发表时间）