STRUCTURAL DESIGN AND EXPERIMENTAL STUDY OF A PRECISION POSITIONING TABLE

摘要：

For satisfying the requirement of the high speed and precision table in the chip packaging application, a high speed precision positioning table was designed. The table was driven directly by linear voice coil actuator in the direction of X, Y and Z separately. The simulation model of positioning table was set up. Dynamic optimization design of spring which is the critical component of flexible decoupling mechanism in positioning table was performed using the virtual prototyping technology. Match principle between spring rigidity and preload was analyzed. Method of combining the finite element analysis and the mechanical system design was used to design and analysis the flexible hinge. The prototype of positioning table was fabricated. Experimental results show that the precision positioning table achieves the design target and prove that the design theory is correct.

关键词： positioning table finite element design simulation

作者: WU Yimin YAN Shijing ZHOU Zhige WANG Haixia

作者单位: Hebei University of Technology , Tianjin, 300130

会议类型: 国际会议

会议名称: International Technology and Innovation Conference 2009(2009技术与创新国际学术会议)

会议地点: 西安

会议语种:英文

页码: 1-5

在线出版日期: 2009-10-12（万方平台首次上网日期，不代表论文的发表时间）