Comparison of Scanning Evanescent Microwave Microscopy with Co-Planar Waveguide Methods of Characterization of Ba0.5Sr0.5TiO3 Thin Films

摘要：

The permittivity of a barium strontium titanate thin film was measured at 1.8 GHz and 4.4 GHz with a scanning evanescent microwave microscope (SEMM) and co-planer waveguides (CPW). The raw data suggests the SEMM has sufficient sensitivity to detect significant variations in permittivity across the film that the CPWs could not. The average value of permittivity extracted from the data is consistent with that extracted from the co-planar waveguide measurements but the error bars associated with the extraction are large, of the order of 25 %. The significant contribution to the error in the final result from the SEMM is due to the analytical model used.

作者: D. J. Barker P. M. Suherman T. J. Jackson M. J. Lancaster

作者单位: School of Electrical,Electronic and Computer Engineering,University of Birmingham,Edgbaston,Birmingham,B15 2TT,United Kingdom

会议类型: 国际会议

会议名称: 2009 The 18th IEEE International Symposium on Applications of Ferroelectrics(2009年国际铁电学暨IEEE国际铁电应用联合会议)

会议地点: 西安

会议语种:英文

页码: 236-241

在线出版日期: 2009-08-23（万方平台首次上网日期，不代表论文的发表时间）