A Novel Method for Fabricating 2-D Array Piezoelectric Micromachined Ultrasonic Transducers for Medical Imaging

摘要：

Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6×6 pMUT arrays with element pitch down to 150μm were successfully fabricated and characterized. The devices consist of 2μm PZT film on a 3μm Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process to ensure high elements density. The resonance frequency and dielectric properties were also investigated and the results show its potential for the application in 3-D imaging probes.

关键词： piezoelectric micromachined ultrasonic transducer ferroelectric thin film, PZT medical imaging

作者: Di Fu Tian-Ling Ren Hao Chen Yi Yang Xiang-Ming Kong Yuan Ren W-J Liao Li-Tian Liu

作者单位: Institute of Microelectronics,Tsinghua University,Tsinghua National Laboratory for Information Science and Technology,Tsinghua University,Haidian District,Beijing 100084,China

会议类型: 国际会议

会议名称: 2009 The 18th IEEE International Symposium on Applications of Ferroelectrics(2009年国际铁电学暨IEEE国际铁电应用联合会议)

会议地点: 西安

会议语种:英文

页码: 358-361

在线出版日期: 2009-08-23（万方平台首次上网日期，不代表论文的发表时间）