Micromachined Piezoelectric Energy Harvester with Low Vibration

摘要：

In this paper, a piezoelectric MEMS energy harvester was investigated and evaluated to scavenge power from ambient vibration source. It was optimally designed to generate the electrical power from low level ambient vibration via the piezoelectric effect. In order to generate the electricity at low vibration, the proposed energy harvester was fabricated by patterning platinum electrode into inter-digital geometry on top of the sol々gel-spin coated Pb(Zr,Ti)O3 thin film for d33 piezoelectric mode operation on the silicon cantilever with proof mass by using bulk micromaching technique. The fabricated energy harvester has a 1.1uW of output power to 2.2Mз of load resistance with 4.4Vpeak-to-peak from a vibration of 0.39g acceleration at its resonant frequency of 528Hz. The corresponding power density was 2.8mW·cm-3·g-1.

作者: Jong C. Park Jae Y. Park

作者单位: Micro/Nano Devices and Packaging Lab.,Department of Electronic Engineering,Kwangwoon University,447-7 Wolgye-dong,Nowon-gu,Seoul,Republic of Korea

会议类型: 国际会议

会议名称: 2009 The 18th IEEE International Symposium on Applications of Ferroelectrics(2009年国际铁电学暨IEEE国际铁电应用联合会议)

会议地点: 西安

会议语种:英文

页码: 433-438

在线出版日期: 2009-08-23（万方平台首次上网日期，不代表论文的发表时间）