Performance Analysis and Measurement of micro-machined Gyroscope

摘要：

The micro-machined gyroscope,with advantages of small size,lower weight,high reliability,lower power consumption and lower cost,has an observably increasing usage in many fields. At present,the development of comb capacitive micro-machined gyroscope is very fast dueto its high reliability. The resent gyroscopes are in rate grade and can not satisfy the demands on tactical grade and navigation grade. Therefore,how to improve the performance of gyroscope has become a main target pursued by designers. The comb capacitive micro-machined gyroscope basing on the Corioliss effect is a land of vibration gyroscope. The vibration properties are important parameters for the micro-machined gyroscope. The working performance of micro gyroscope can be clearly understood and its other performances can be known only when its vibration properties were obtained We tested the vibration properties of comb capacitive micro-machined gyroscope in normal atmosphere.Some instruments used in testing experiment are turntable,direct current power source,dynamic signal analyzer,data acquisition circuit and data storage system etc.From the testing results,we obtained the driving resonant frequency and the detection resonant frequency of micro gyroscope. The quality factors in two directions are also obtained.

关键词： comb capacitive micro gyroscope performance measurement vibration characteristics quality factor natural frequency.

作者: Liu Haipeng Gao Shiqiao Liang Xinjian Jin Lei

作者单位: State Key Laboratory of Explosion Science and Technology,Beijing Institute of Technology School of Electro-Mechanical Engineering,Beijing Institute of Technology,Beijing,100081

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 30-34

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）