The Study of High Accuracy Capacitive Displacement Sensor Used in Non-contact Precision Displacement Measurement
high precision displacement measuring system is designed by using a capacitive displacement sensor,which carries on non-contact measurement in a certain machine tool spindles thermal deformation.Systems fundamental and data processing methods have been illustrated through the analysis of objects features. The factor of influenced sensors measurement accuracy and stability is analyzed as well. Then the paper proposes a technical means to utilizing electronic and digital signal filtering technology for enhancing accuracy of sensors.It provides an alternative technological approach for machine tool spindles high precision on non-contact measurement. After a long period of trial analysis and system calibration,the resolution of the whole measuring system comes up to 30nm,and linearity is superior to 0.6μm. The requirement of withdrawing precision machine tool in processing spindle thermal deformations properties is satisfied,and the measurement system also provides a meaningful reference to capacitive displacement sensor in a similar application of non-contact high precision measurement.
capacitive displacement sensor machine tool spindle thermal deformation
Haima Yang Ruiting Li Qingzhong Wei Jin Liu
School of Optical Electrical and Computer Engineering,University of Shanghai for Science and Technol School of Optical Electrical and Computer Engineering,University of Shanghai for Science and Technol
国际会议
2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)
北京
英文
64-68
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）