High-sensitivity Capacitive Silicon micro-accelerometer

摘要：

In recent year,capacitive silicon micro accelerometer still is the research hotspot.How to enhance the detection accuracy and further expand its application fields is the emphases and difficulty,whichs key point is to reduce noise. The noise mainly includes mechanical thermal noise and detection circuit noise. The weak signal detection ways are adopted to reduce the noise,to guide the design of sensitive element and the external circuit,to improve the system linearity and resolution. And through the static and dynamic noise test,the noise power spectral density can be tested;the accelerometer sensitivity can also be detected. After testing,we can see that the sensors linearity is 1123.2mv/g-1,the static noise spectral density is 44.5ug/(Hz),the dynamic noise power spectral is 0.05mV/(Hz),which are superior to similar studies.

关键词： capacitive silicon micro-accelerometer signal noise ratio linearity and resolution static and dynamic noisetest

作者: Ling Wang Yongtian Wang Hanyu Zhao

作者单位: College of Mechanical & Electrical Engineering,Henan Agriculture University Zhengzhou 450002,Henan Province,P.R.China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 95-98

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）