Effects of Combs on Coupling Error in the Vibratory MEMS Gyroscope with Various Air Dampings
This paper presents the fourth order vibratory micromachined gyroscope prototype with coupling forces between two modes and the coupling error expression which reveals all the factors affecting the amplitude of the error. A detailed discussion has been performed to determine that the diversity of structures of drive combs and sense combs is the main source of the Quality factor in drive mode varying from that in sense mode,and different frequencies in which coupling error centralizes with various air dampings.It is demonstrated that coupling error centralizes in the drive mode resonance frequency in 1 atmosphere while the error in sense mode resonance ascends in the presence of higher vaccum based on the experimental and fitting curves,and sense mode has almost the same error magnitude as drive mode in 782 mtorr vaccum with the measured data. The analysis of combs effect on coupling error is significant for the optimization of comb structure,and provides a theoretical availability for the implementation of vaccum package and the greatly improved stability of MEMS gyroscopes.
combs effect vibratory MEMS gyroscope coupling error air damping.
Wenwen Zhou Bin Zhou Zhiyong Chen Rong Zhang
Department of Precision Instruments and Mechanology,Tsinghua University Beijing,100084,China
国际会议
2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)
北京
英文
298-301
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）