Measuring System for Micro Force Based on Electrostatic Theory

摘要：

The micro force measuring technology is widely used in the area of micro friction test,liquid surface tension analysis,organism micro-structure force test,measurement and calibration of MEMS and NEMS,etc.In view of measurement and realization approach of micro force value,a micro measuring system is proposed. A control electrostatic force generator is adopted to reproduce micro force. The basic working principle is an exact designed cylindrical capacitor with the characteristics of long measurement range,fine linearity and faint border effect. A linear axletree with high precision and linearity is used to ensure concentricity of movement.In order to eliminate the interference from parasitical capacitance a hermetical shield is designed.By means of measuring the voltage between electrodes and capacitance change gradient,the micro force test at μN~nN degree could be realized.

关键词： micro force value capacitance change gradient electrostatic force capacitive sensor

作者: Yongyue Qi Haitao Wang Yuchi Lin Meirong Zhao

作者单位: State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,300072 Tianjin,China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 524-527

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）