Design of MEMS Electrometer for Highly Sensitive Charge Measurement

摘要：

A new scheme of MEMS vibrating reed electrometer is proposed,which has eliminated bias current leakage of preamplifiers.Its principle stays largely the same to Gunns largescale electrometer proposed in 1932,input Charge is shared between a variable capacitor formed by the vibrating reed and a fixed capacitor,charge is measured by detecting the AC image current caused by charge redistribution. Theoretical calculation showed a charge resolution of 286 electrons in 0.3 Hz bandwidth,showing some compromise between charge resolution and bias current leakage.

关键词： MEMS electrometer Vibrating reed electrometer bias current.

作者: Zhuang Li Bintao Lin Chilai Chen Deyi Kong

作者单位: Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei,230031,China Department of Autom Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei,230031,China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 590-593

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）