Modeling and Simulation for a μ-structure Silicon Pressure Sensor

摘要：

Based on the sensing mechanism of microsensor,a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated,analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals,a set of optimum parameters of the proposed sensing unit is determined.

关键词： microsensor beam E-type round diaphragm pressure finite-element method

作者: Ahmad Aldarouich Haiwen Yuan Mohamed El Mahdi Ali Jiaoying Huang

作者单位: School of Automation Science and Electrical Engineering,Beihang University.Beijing 100191,China School of Instrumentation Science & Opto-Electronics Engineering,Beihang University,Beijing 100191,C

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 825-829

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）