Research of Micro-positioning System Based on Piezoelectric Actuator

摘要：

In order to satisfy the request of machining accuracy and fast response of ultra-precision machining,a micro-positioning system based on piezoelectriC actuator and flexure hinge structure is designed. The mechanical property of hinge structure is analyzed in theory and its inherent frequency is obtained by experiment. A controllable high voltage circuit is designed to actuate PZT,and its static and dynamic characteristics are analyzed by experiments of linearity test,sinusoidal and step response. Combined with the measurement system of a diffraction grating,hysteresis and frequency response characteristics of piezoelectric ceramic actuator,a micro-positioning control algorithm is proposed based on the maximum slope method. According to experiments of the computer sample control system which is built,the positioning travel range is 19μm,the positioning accuracy is better than 0.1μm,the positioning time is less than 0.2s.

关键词： micro-positioning system PZT dynamic characteristic fast positioning.

作者: Xuanze Wang Yufen Chu Zhongsheng Zhai

作者单位: School of Mechanical Engineering,HuBei University of Technology,China 430068 HuBei Key Lab of Manufa School of Mechanical Engineering,HuBei University of Technology,China 430068

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 897-902

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）