A Research of RHEED in Analysis of Growth Model and Interplanar Distance of ZnO Films

摘要：

Reflection high-energy electron diffraction (RHEED) is one of the instruments which can exam the surface of the material sensitively. RHEED was often used as a tool of qualitative analysis and seldom used as quantitative analysis in crystal materials. In this paper,RHEED was attempted to analyze and calculate the interplanar distance of two important directions in (0001) plane of ZnO films and desired results were obtained. This shows that RHEED can be used to analyze crystal structure precisely.

关键词： RHEED interplanar distance ZnO thin films.

作者: Zhaoyang Wang Jie Zhao

作者单位: School of Science,Shenyang Institute of Aeronautical Engineering,Shenyang.Liaoning 110136,China Department of Physics,Kunming University of Science and Technology,Kunming,Yunnan 650093,China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 1119-1121

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）