A New MEMS Accelerometer Applied in Civil Engineering and its Calibration Test

摘要：

The micro-electro-mechanical systems (MEMS) technology has broadened the horizon for sensors design,and MEMS devices,such as sensors and actuators,with low manufacturing cost,compact size,low weight and power consumption,are widely used in many industrial fields. A new type of MEMS accelerometer designed for the application in civil engineering is introduced in this paper. The some characteristics parameters of the sensor,such as reliable response frequency range and cross-axis sensitivity ratio,are tested through the calibration experiments designed in the paper,with the consideration based on application fields of the accelerometer.

关键词： MEMS accelerometer low-frequency response cross-azis sensitivity ratio test.

作者: Ming Zhao Xiaolei Xiong

作者单位: Department of Civil Engineering,Tongji University Siping Road 1239,200092 Shanghai,China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 1199-1202

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）