Measurements on Mechanical Properties of Boron-doped Silicon Materials for Micro Inertia Sensor

摘要：

The capacitive structure of comb capacitive micromachined gyroscope is a kind of important structure. The mechanical properties of micro inertia sensor material had changed when the structures experienced high temperature boron diffusion,lithography and etching et. Al. micromachined process. Therefore,it is necessary to measure the basic mechanical properties of borondoped material in order to supply exact material parameters for design and fabrication of micro inertia sensor. With the rapid development of measurement technologies,the nano indentation technology had become an ideal method to obtain the mechanical properties of MEMS structures material accurately. We obtained the elastic modulus and hardness of heavy boron-doped silicon material using nano indenter. The experimental results showed that the elastic modulus and hardness of heavy boron-doped silicon material had increased comparing with the silicon material.

关键词： comb capacitive structure heavy boron-doped silicon nano indentation hardness elastic modulus.

作者: Haipeng Liu Shiqiao Gao Shaohua Niu Lei Jin

作者单位: State Key Laboratory of Explosion Science and Technology,Beijing Institute of Technology Beijing,100 School of Electro-Mechanical Engineering,Beijing Institute of Technology,Beijing,100081

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 1251-1256

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）