Precise Rate of Flow Piezoelectric Mini-pump with Built-in Self Test
This paper presents a built-in self test pump actuated by piezoelectric bimorphs for fluidic systems. The sensor fabricated by MEMS ensures the flow to be 0. 1μl/s. The pump is characterized by thin structure,precise rate of flow,low power consumption,etc. A prototype of the pump,with a size of 20mm,20mm and 7mm,is fabricated by precise manufacturing. Simulations and experiments show that the piezoelectric pump has high efficiency and good performance. With a voltage of 75V,the flow rate is 0.5μI every three electronic pulses and its power consumption is only 2.6mW. A robust passive high pressure check valve is developed for piezoelectric actuated pumps. A novel metal check valve flap is used to increase the valves structural stiffness with pressures up to 20.4kPa. A series-wound multi-pump chamber structure prevents valve-flap from failure under extreme high pressure.
Piezoelectric pump Multi-chamber pump Built-in self test Piezoelectric vibrator.
Zunqiang Fan Zhigang Yang Jingshi Dong Fengjun Tian Bin Jiang
College of Mechanical Science and Technology,JiLin University Department of aviation theory,Aviation University of Air Force
国际会议
2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)
北京
英文
1325-1329
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）