A Digital Control System for Micro-comb Gyroscope

摘要：

Vibratory gyroscope exploit a coriolis force coupling between two degree of freedom internal to the sensor for detection of the sensors angular rotation rate. The peripheral circuit is the key part to realize the function of the gyro system. The peripheral circuit traditionally adopts pure analog circuit. However,the analog circuit has some inherent shortcomings. These limit the accuracy of the gyro. In this paper,a digital control system for micro-comb is introduced. According to testing the gyro performance is much improved by means of the digital control system.

关键词： MEMS micro-comb gyroscope angular velocity sensor capacitive sensor DSP weak signal detection C/V conversion self-ezited drive

作者: Niu Shaohua Gao Shiqiao Liu Haipeng

作者单位: School of Mechatronical Engineering,Beijing Institute of Technology,China

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 1834-1837

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）