Small-Sized Large Travel Nano-Positioning System Based on Tubular Permanent Magnet Synchronous Linear Motor
With the high-speed development of modern science and technology as well as the rapid advancement of manufacturing technology,especially the micromachining technology and semiconductor manufacturing,the feature size of micro-structure machinery is getting smaller and smaller and the positioning accuracy requirements for micro-machining platform and measurement platform have been increased to nanometer class. At present,small-sized and large travel nano-positioning system has become the research focus of the major countries in the world. In this paper,a miniaturized nano-positioning system based on the tubular permanent magnet synchronous linear motor and grating is established,in which the linear motor is adopted to realize large travel actuation and nano-positioning control and the grating is utilized as displacement measuring and feedback controlling device. Through the study of actuation control strategy and feedback control method,the actuation speed of greater than 3mm/s and positioning stability of less than 10nm in the 100mm actuation range are obtained.
nano-positioning system miniaturization linear motor grating.
Congyu Xu Xiaofen Yu Lingli Cheng
School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China
国际会议
2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)
北京
英文
2607-2610
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）