Design and Simulation of a Micro Gyroscope with Decoupled and High Linearity Structure

摘要：

A novel micro gyroscope with decoupled and high linearity structure is proposed and simulated. The gyroscope is actuated by electrostatic force and detected by the lateral comb capacitors. The lateral comb capacitors have high linearity,improving the linearity of the gyroscope. The gyroscope achieves complete decoupling between drive and sense modes to minimize the mechanical crosstalk thanks to the intermediate mass and decoupling beams. Drive and sense amplitudes,mechanical and electrical sensitivities and the quality factor are extracted analytically and results are confirmed using finite element analysis. The FEA using ANSYS shows drive and sense frequency of 4793Hz and 5150Hz respectively for only 3% mismatch in resonance frequency. The output signal achieves 20nm amplitude for 200 °/s input rotation rate at atmospheric environment,which results in 2.95aF linear change in the lateral comb capacitance.

关键词： micro gyroscope decoupled structure linearity.

作者: Xinjian Liang Shiqiao Gao Feng Gao Shengtao Lv

作者单位: Department of Mechatronical Engineering,Beijing Institute of Technology 5 South Zhongguancun Street, Beijing Global Information Application Development Center 22 Beiqing Street,Haidian District,Beijing Institute of Equipment,Chinese Peoples Armed Police Force 8 South Zhongguancun Street,Haidian Distr

会议类型: 国际会议

会议名称: 2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)

会议地点: 北京

会议语种:英文

页码: 3103-3107

在线出版日期: 2009-08-16（万方平台首次上网日期，不代表论文的发表时间）