Rotatory Stepping Piezoelectric Motor With Micro-angle
The rotatory piezoelectric motor(PZT) with microangle, based on Inchworm motion, is presented. By the flexible machinery, the displacement of the piezoelectric actuators is transformed into angle. The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship. By clamping or releasing of clampers and extending or retracting of actuators, it could achieve a kind of push-pull relay movement. In this way, the movement of platform is smooth and continuous. With the proper four-channels driving signals, the motor is moved linearly with single step or multi-step. The performances of the motor are tested through experiments. The results show that the motion of the motor is linear, The moving speed can reach 430.4/s at the voltage of 160V and the minimal step is less than 3.
Nano-positioning micro-angle Inchworm motion minimum step flezure hinge piezoelectric ceramic
Changde Hu Yongqiang Li Meirong Zhao Sha Zhu
Department of Non-commissioned Officer,the Academy of Equipment Command & Technology,Beijing 102200, State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University 300072,Chi
国际会议
2009 9th International Conference on Electronic Measurement & Instruments(第九届电子测量与仪器国际会议 ICEMI2009)
北京
英文
3773-3777
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）