A Novel Micro Pirani Gauge with Mono-wire Sensing Unit for Microsystem Application

摘要：

This paper reports a novel, simple, low-cost and high sensitivity micro Pirani gauge to monitor long-time pressure change and stability inside a vacuum package. The packaging structure is very simple with one wire as sensing part only. Two ends of a metal wire with a certain temperature coefficient of resistance are bonded to the pads of the ceramic structure with a cavity for microsystem application. The metal wire and the packaged part can be formed as a micro Pirani gauge. The dynamic range of this novel Pirani gauge in our experiment is from 1Pa to 100Pa.

作者: Yunsong Qiu Lei Zhao Yufeng Jin

作者单位: Shenzhen Graduate School of Peking University, Shenzhen 518055, China National Key Lab of Micro/ Nan Nanjing Dajing Hi-tech, Inc., Floor7, No.6, Ji E Lane, Zhujiang Road, Nanjing 210018, China

会议类型: 国际会议

会议名称: 2009 International Conference on Electronic Packaging Technology & High Density Packaging(2009 电子封装技术与高密度集成技术国际会议)

会议地点: 北京

会议语种:英文

页码: 467-470

在线出版日期: 2009-08-10（万方平台首次上网日期，不代表论文的发表时间）