Direct-write Techniques for Maskless Production of Microelectronics: A Review of Current State-of-the-art Technologies
Recently, there has been growing interest in direct-write methods for the manufacturing of microelectronic products, as the entire electronics industry sector is aiming towards low cost, rapid manufacturing and shorter time-to-market, as well as reduced environmental impacts. This paper will review the main direct-write techniques, most of which have been invented or seen significant development during the last decade. These techniques include droplet-based direct writing, such as inkjet printing, filament-based direct writing, such as the Micropen and nScrypt processes, tip based directwrite methods, and laser beam direct writing. For each category, only a few examples are presented, although there are a number of specific methods and variants within each of these categories.
Yan Zhang Changqing Liu
Wolfson School of Mechanical and Manufacturing Engineering, Loughborough UniversityWolfson School of Mechanical and Manufacturing Engineering, Loughborough University, Loughborough, Leicestershire,United Kingdom, LE11 3RQ
国际会议
北京
英文
497-503
2009-08-10(万方平台首次上网日期,不代表论文的发表时间)