A Study on the Characterization of Quasi-Three-Dimensional PN Junction Capacitor

摘要：

This paper discusses a novel quasi-three-dimensional PN Junction capacitor, which has a high density of capacitance (200nF/cm2) with a relatively high working frequency (3GHz). These properties are because of its unique trench structure. To identify the performance of this kind of capacitor, some tests were carried out at both low frequency and high frequency. Moreover, a typical power supply filter network was designed to compare the embedded capacitor with a commercial 2nF SMD 0402 capacitor.

作者: Huijuan Wang Yao Lv Wei Gao Lixi Wan

作者单位: Institute of Microelectronics of Chinese Academy of SciencesB503, 3＃, BEITUCHENG West, CHAOYANG Dist Institute of Microelectronics of Chinese Academy of Sciences B503, 3＃, BEITUCHENG West, CHAOYANG Dis

会议类型: 国际会议

会议名称: 2009 International Conference on Electronic Packaging Technology & High Density Packaging(2009 电子封装技术与高密度集成技术国际会议)

会议地点: 北京

会议语种:英文

页码: 941-944

在线出版日期: 2009-08-10（万方平台首次上网日期，不代表论文的发表时间）