Non-destructive Detection System for Micro-particle Contaminant on Super-smooth Optical Surface

摘要：

Regarding the demand of a high cleanness optical surface for an experimental prototype, a method of nondestructive detection of micro-particle contaminants is proposed. Aimed at the detection of cleanness, an improved, self-designed scanner image sampling of the particle contaminations on the optical surface was used. The hardware elements implemented with the algorithm of image processing to detect particle pollutant, based on the Cannys operator, in order to identify the edge of particle. The construction the local closed interval was done by calculating a convex hull with Graham algorithm, thus obtaining the image of particle contamination via the threshold segmentation. Identification of the particle contamination based on RVM (Relative Vector Machine) is demonstrated. The results from the relevant experiments in the super-cleanness circumstance confirmed the usefulness of this system.

关键词： Cleanliness level non-destructive detection Canny’s operator RVM micro-particle contamination

作者: Zheng Ren Zhijiang Xie Yi Wang Xue Wang Yong Jiang Changchun Liu

作者单位: College of Mechanical Engineering, Chongqing University, Shapingba District, Chongqing400044, China College of Mechanical Engineering,Chongqing University, Shapingba District, Chongqing400044, China

会议类型: 国际会议

会议名称: 第二十届国际生产研究大会

会议地点: 上海

会议语种:英文

页码: 1-5

在线出版日期: 2009-08-02（万方平台首次上网日期，不代表论文的发表时间）