Constant Force Feedback Controller Design Using Fuzzy Technique for a Tapping Mode Atomic Force Microscope
A constant force feedback mechanism based on fuzzy logic for a tapping mode Atomic Force Microscope is proposed in this paper. A nonlinear dynamic model for characterizing the cantilever-sample interaction is first developed. Then, a PD-like fuzzy controller is designed to overcome the shortcomings of a traditional PID controller in a tapping mode Atomic Force Microscope. By using the PD-like fuzzy controller, the cantilever tip can track the surface of the sample rapidly and accurately even though the topology of the surface is arbitrary and not given a priori. The rapid tracking response allows us to observe high aspect ratio micro structure accurately and quickly. In final, a computer simulation is provided to demonstrate the effectiveness and confirm validity of the proposed controller.
Atomic Force Microscopy (AFM) photodiode piezotube tapping mode PD-like fuzzy controller
Yuan-Jay Wang
Department of Electrical Engineering, TungNan University, 152, Sec. 3, Peishen Rd., Shenkeng Township, Taipei, 222
国际会议
2009年中国控制与决策会议(2009 Chinese Control and Decision Conference)
广西桂林
英文
1691-1696
2009-06-17(万方平台首次上网日期,不代表论文的发表时间)