Finite Element Analysis on Electrode Structure of QCM
Because quartz crystal is complex at high frequency vibration, the only vibration mode of QCM will be destroyed at some designs of electrode structures and couplings with other vibration modes will happen sometimes. This paper makes a 3D model for QCM and analyzes directly the coupled phenomenon of the structural and electric fields of QCM with finite element method. Through analyzing the convergence of the resonant frequency of QCM, the correctness of finite element analysis is proved. Then the influence of different sizes of electrode on vibration of QCM and an optimal size of electrode is discovered. And design of mesa on crystal plate is provided to solve the question that energy trapping is not good enough. This design proves valid based on finite element calculation and the optimal height of mesa is given.
QCM coupling finite element energy trapping
Haifeng Jiang
Institute of Automation, NanJing University of Science and Technology
国际会议
2009年中国控制与决策会议(2009 Chinese Control and Decision Conference)
广西桂林
英文
3618-3621
2009-06-17（万方平台首次上网日期，不代表论文的发表时间）