Influence of Nano Zinc Ozide Treated by HMDS in Humidity Detection
QCM-based gas sensors are potential for applications due to its simple structure and high sensitivity. But the low selectivity attributed to the environment factors need to be concerned such as the variations of humidity and volatile organic vapors. In this paper, humidity sensitive properties of HMDS treated nano zinc oxide was researched. The work can be divided into two sections: First, the sensing properties of nano zinc oxide were studied by quartz crystal microbalance (QCM) in relative humidity detection. The results showed that the nano zinc oxide film had high humidity sensitivity and well reproducibility. Second, the humidity sensing properties of nano zinc oxide treated by Hexamethyldisilazane (HMDS) were also investigated. It is found that the humidity sensitivity of nano zinc oxide treated by HMDS was much lower than untreated ZnO, especially in high relative humidity environment. The experiment results indicate that the HMDS treated by nano zinc oxide can be used to detect the ethanol in high humidity environment.
Quartz Crystal Microbalance (QCM) Relative humidity ZnO HMDS
Jiayun Lu Quansheng Jiang Jian Zhang
Department of physics,Chaohu University,Chaohu 238000,China Department of Electronical Engineering,East China Normal University,Shanhai 200062,China
国际会议
2009年中国控制与决策会议(2009 Chinese Control and Decision Conference)
广西桂林
英文
4823-4827
2009-06-17（万方平台首次上网日期，不代表论文的发表时间）