CMOS Microelectrode Array for Signal Recording and Stimulating of Neurons Assemble
a microelectrode array (MEA) chip for in-vitro signal recording and stimulating of neurons assemble is presented. The chip comprises 4×4 active sensor cells and ESD protection circuits. Each sensor cell is 60μm×60μm in dimension, including a 15μm×25μm stimulating electrode, a 15μm×25μm recording electrode and two NMOS switches which can linearly transfer signals with peak-to-peak values from 50 μV to 500 mV. The final chip is realized in a standard 0.5 μm DPDM (double-poly double-metal) CMOS technology. It covers an area of 1.0mm×1.0mm. The results of on-wafer electrical test indicate the independent electrical characteristic of the stimulating electrode and the recording electrode and verify the functionality of the NMOS switches. The tests carried out in the NaCl solution for the packaged chip have verified the electrical functionality of the MEA chip.
biomedical devices microelectrode array CMOS neurons assemble
Hai-Xian Pan Xiao-Ying Lü Zhi-Gong Wang
State Key Lab of Bioelectronics,Southeast University,210096 Nanjing,P.R.China Institute of RF-& OE-ICs,Southeast University,210096 Nanjing,P.R.China
国际会议
北京
英文
1-4
2009-06-11（万方平台首次上网日期，不代表论文的发表时间）