Capacitive Silicon Micro-accelerometer Detecting Technology Research
In order to increase the capacitive accelerometer testing accuracy, to increase its usefulness, the comb-capacitive accelerometer is selected, the use of capacitive differential detection principle to detect acceleration changes; Based on the capacitance Charge-discharge characteristics, design the small differential capacitance detection circuit, including C-V converter, differential amplification, full-wave rectifier. Each module for the simulation. Finally, capacitive accelerometer do the static test and dynamic test on the two state Unearity comparison shows that this design increase not only the capacitive accelerometer linearity, but also its usefulness.
capacitive silicon micro-acclerometer weak signal detection charge-discharge signal-noise ration static test dynamic test
LI Yan WANG Ling LIU Jun
College of Mechanical & Electrical Engineering Henan Agricultural University Zhengzhou,china
国际会议
长沙
英文
186-189
2009-04-11（万方平台首次上网日期，不代表论文的发表时间）